Tom qab cov qauv zoo sib xws ntawm ib lub voj voog yog etched rau hauv silicon wafer, lub ntsej muag tiv thaiv photoresist- ib txheej ntawm tawv, ntoo khaub lig- txuas polymer- yuav tsum tau muab tshem tawm kom huv si thiab huv si. Qhov no yog ua tiav nyob rau hauv ib da dej kub uas muaj zog, txhoj puab heev organic solvents, feem ntau rhuab mus rau ib puas degrees Celsius. Lub immersion rhaub nyob rau hauv no volatile, corrosive chemistry yuav tsum tau ua los ntawm cov khoom uas cov kuab tshuaj tsis tuaj yeem yaj, o, los yog paug. PTFE yog chemically mute, inert khoom.
Lub luag haujlwm ntawm PTFE rhaub hauv Photoresist Stripping
Lub stripping da dej feem ntau yog sib xyaw ntawm cov kuab tshuaj xws li N-Methyl-2-pyrrolidone (NMP), dimethyl sulfoxide (DMSO), thiab muaj zog alkaline amines, rhuab mus rau 80-110℃. PTFE immersion rhaub yog tus qauv xaiv rau daim ntawv thov no. Nws cov chemically inert sheath yog resistant rau cov hnyav hnyav, uas yuav txwv tsis pub tawm tsam cov qauv plastics thiab corrode hlau.
Lub PTFE rhaub muab huv si, ruaj khov, thiab meej tshav kub yam tsis tso cov hlau ions lossis lwm yam kab mob uas tuaj yeem tso rau ntawm qhov chaw pristine wafer. Cov uas tsis yog -stick, du PTFE nto tiv thaiv kev tsim cov txheej txheem photoresist residue, tuav lub cua sov kom huv si saum npoo rov ua dua. Lub PTFE rhaub photoresist stripping wafer txheej txheem ua kom cov khoom sib txawv ntawm qhov kub thiab txias thiab txo qis hauv zos boiling los yog bumping uas yuav cuam tshuam qhov muag wafers.
"Lub PTFE lub tshuab cua sov yog cov tshuaj uas ntsiag to, kub ntiv tes hauv da dej ntawm cov kuab tshuaj muaj zog, tshem tawm lub npog ntsej muag yam tsis muaj ib qho kab ntawm nws tus kheej, thaum khaws cov wafer pristine thiab hluav taws xob tsis zoo."
Kev xav txog kev nyab xeeb
Cov kuab tshuaj sib tov yog flammable, tshuaj lom, thiab feem ntau ua haujlwm nyob ze nws qhov boiling point. Kev tsim lub tank kom zoo, suav nrog cov ntaub thaiv npog, hauv av, thiab qhov cua, yog qhov yuav tsum tau ua kom tsis txhob muaj hluav taws kub, vapor raug, lossis hluav taws xob hluav taws xob. Conservative watt densities yuav tsum tau tswj cov cua sov thiab tsis txhob hnyav hnyav los yog hauv zos overheating ntawm PTFE sheath.
Cov txiaj ntsig ua haujlwm
Siv PTFE rhaub hauv cov txheej txheem no tso cai:
Tshuaj tiv thaiv kab mob hnyav hnyav hnyav sib tov.
Kev tu kom huv ntawm wafer huv thiab hluav taws xob ncaj ncees.
Ntev - lub sij hawm cia siab rau yam tsis muaj corrosion los yog degradation.
Txawm li cas los xij, residue -dawb cua sov tseem ceeb rau siab - tawm los ntawm semiconductor fabrication.
Xaus
Lub PTFE immersion rhaub yog qhov tseem ceeb, tshuaj tiv thaiv kab mob cua sov uas ua kom huv, ua tiav stripping ntawm photoresist los ntawm wafers hauv semiconductor fabrication. Los ntawm kev muab cov khoom ruaj khov, tsis muaj paug- cov cua sov dawb hauv chav da dej hnyav hnyav heev, PTFE lub rhaub kom paub meej qhov kev huv huv atomic tseem ceeb rau niaj hnub microelectronics. Lub zoo meej, flawless nto ntawm lub computer nti yog ua tiav los ntawm kev sib xyaw ntawm cov tshuaj lom neeg ua phem thiab inert, txhim khu kev qha cua sov.
