Siab -Purity PFA rhaub rau Semiconductor thiab Electronics Manufacturing — Cov Kev Xav Tau Tshwj Xeeb thiab Daim Ntawv Thov

Hauv kev lag luam semiconductor, microelectronics thiab kev lag luam tshuaj, cov kev xav tau purity rau cov txheej txheem tshuaj yog nruj heev, thiab txawm tias cov kab hlau ion ua paug yuav ua rau cov khoom seem lossis kev puas tsuaj. Ib txwm muaj-qib PFA cov cua sov tsis tuaj yeem ua tau raws li qhov yuav tsum tau ua kom huv huv, yog li siab -purity hluav taws xob- qib PFA cov cua sov tau tshwm sim los ua ib pawg tshwj xeeb. Cov cua sov no siv ultra-siab purity PFA resin thiab yog tsim nyob rau hauv nruj huv huv tej yam kev mob, ua kom tsis muaj ion nag lossis daus thaum siv thiab dhau los ua cov khoom siv cua sov rau siab - kawg cov txheej txheem huv.

Qhov tseem ceeb sib txawv ntawm siab -purity PFA rhaub thiab cov khoom lag luam zoo tib yam- qib cov khoom nyob rau hauv purity ntawm raw cov ntaub ntawv. Electronic- qib PFA resin siv cov txheej txheem tshwj xeeb polymerization thiab purification, nrog cov ntsiab lus tsis tshua muaj hlau tsis huv, fluoride ions thiab cov organic residues. Cov hlau ion nag lossis daus ntawm siab -purity PFA tom qab ntev- lub sij hawm immersion feem ntau yog nyob rau ntawm ppt (ib feem trillion) qib, thaum zoo tib yam kev lag luam PFA tej zaum yuav nyob rau theem ppm, qhov sib txawv ntawm ntau lab lub sij hawm. Qhov no ultra- cov yam ntxwv los nag tsawg ua kom ntseeg tau tias cov txheej txheem cua sov yuav tsis ua kom muaj kuab paug siab - cov tshuaj purity purity, ua tau raws li cov kev cai huv huv ntawm kev ua wafer.

Hauv kev tsim khoom semiconductor, siab -purity PFA heaters yog dav siv nyob rau hauv ntau yam txheej txheem ntub dej. Lub tshuab ntxuav wafer yuav tsum ua kom sov ntau yam tshuaj ntxuav kev daws teeb meem xws li SC1, SC2, sulfuric acid hydrogen peroxide, thiab lwm yam. High-purity PFA cov cua sov tuaj yeem ncaj qha rau hauv dej thiab cua sov yam tsis qhia cov pa phem hlau. Hauv cov txheej txheem photoresist stripping thiab etching cov txheej txheem cua sov, siab -purity PFA kuj qhia tau zoo heev corrosion kuj thiab huv. Tsis tas li ntawd, siab -purity PFA heaters kuj yog cov qauv kev teeb tsa hauv kev tsim tshuaj, kev soj ntsuam hauv chav kuaj thiab lwm lub sijhawm uas xav tau ultra{10}} ntshiab kua cua sov.

Cov txheej txheem tsim khoom ntawm siab -purity PFA cov cua sov muaj kev tswj hwm nruj dua li cov khoom lag luam zoo tib yam. Tag nrho cov txheej txheem tsim khoom yuav tsum ua kom tiav nyob rau hauv chav kawm 100 lossis siab dua huv rhiav kom tsis txhob muaj kuab paug hauv ib puag ncig. Tag nrho cov cuab yeej thiab cov khoom siv yuav tsum siv siab - cov ntaub ntawv fluoroplastic purity, thiab tsis tuaj yeem tiv tauj ib qho hlau uas yuav ua rau muaj kuab paug. Tom qab tsim khoom, cov khoom lag luam yuav tsum tau dhau los ntawm ntau-channel ultra- ntxuav cov dej huv thiab ntim kom huv si kom ntseeg tau tias cov khoom xa tuaj rau cov neeg siv khoom yog nyob rau hauv lub xeev huv uas tuaj yeem siv ncaj qha.

Kev pov thawj zoo ntawm siab -purity PFA cov cua sov kuj yuav tsum muaj cov qauv ntsuas tshwj xeeb. Ntxiv nrog rau qhov kev kuaj pom tus pinhole thiab nrhiav kom pom tuab, nws tseem yuav tsum tau ua qhov kev ntsuas ion nag lossis daus, TOC (tag nrho cov organic carbon) kuaj thiab kuaj tus lej particle txhawm rau txheeb xyuas qib kev huv. Tsuas yog cov khoom lag luam uas tau dhau qhov kev sim nruj no tuaj yeem siv tau rau hauv siab - kawg cov txheej txheem huv. Tau kawg, tus nqi siab -purity PFA rhaub kuj tseem siab dua li cov khoom lag luam- qib, feem ntau yog 2 mus rau 3 npaug ntawm cov cua sov PFA.

Table 1 Kev sib piv ntawm Industrial-Qib thiab Electronic-Qib PFA Heaters

表格

Nrog ultra- nag lossis daus ion tsawg thiab kev huv huv siab, siab -purity PFA rhaub tau dhau los ua cov khoom siv tseem ceeb hauv cov khoom siv semiconductor thiab siab -kawg kev lag luam.